Investigator
Investigator for SEM
Record Hardware Settings
2 min
before a sample can be measured, the hardware settings (brightness/contrast, focus and magnification) must be set and recorded for each measurement in section 4 11 the option get hw data and image is described however, in some cases there is no need to evaluate the setup parameters in these cases, the user can choose to only record the sem hardware (hw) data to collect the hardware settings for a specific measurement, select the measurement in the measurement status area then right click on the sample holder position connected to the measurement and select get hw data from the context menu (fig 34) this command will populate the information in the hw data submenu of the measurement properties as shown in fig 35 these parameters include the number of total fields required to cover the defined measurement area (outlined in red) at the selected magnification setting note! the fields scan field size, magnification and resolution can be adjusted for example, if the resolution is changed, the scan field size and magnification will change accordingly if changes are made in the hw data panel, then right click on the sample and select set hw data to apply the new settings once the hardware data has been captured, the distribution of individual scan fields to be measured will be displayed when zooming in on the sample if neither of the measure area options in the settings tab are ticked, frames crossing the shape boundary will be measured (fig 37a) the defined area option (fig 37b) measures only the selected area, i e only the parts of the frames that fall within the measured area will be measured, and not the entire frames that overlap the field boundary note that this is not applicable to polygon shapes if the only inner fields option is selected, only those frames that fit within the selected area will be measured (fig 37c)